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Amplitudes and shapes of fabry-perot resonances in laser interference thermometry of semiconductors and dielectrics

  • Optics, Quantum Electronics
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Abstract

The possibilities of the most sensitive method of laser thermometry of transparent and semitransparent plates have been determined for the varying optical properties of the surface and the conditions of the surface probing. The contrast of light interference in the plates was studied as a function of the diameter of the probing laser beam, the angle of the light incidence onto the surface and its roughness, and the presence of antireflecting and reflecting films on the surface. It is established that the contrast also depends on the transverse temperature gradient in the plate. The measurements were made on silicon single crystals and the optical K-8 glass.

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Authors and Affiliations

  1. Institute of Microelectronics, Russian Academy of Sciences, Yaroslavl, 150007, Russia

    A. N. Magunov & S. V. Merkulov

Authors
  1. A. N. Magunov
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  2. S. V. Merkulov
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__________

Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 70, No. 2, 2000, pp. 58–63.

Original Russian Text Copyright © 2000 by Magunov, Merkulov.

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Magunov, A.N., Merkulov, S.V. Amplitudes and shapes of fabry-perot resonances in laser interference thermometry of semiconductors and dielectrics. Tech. Phys. 45, 199–204 (2000). https://doi.org/10.1134/1.1259597

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  • DOI: https://doi.org/10.1134/1.1259597

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