Abstract
A study is made of the effect of pulse repetition rate (0.1−103 s−1) and average discharge current (0–1 A) on the breakdown delay time and burning voltage of low-pressure glow discharges (p<0.1 Pa) in an electrode system of the reverse magnetron type with a large cathode surface area (≈103 cm2). It is shown that increasing the repetition rate leads to a many-fold reduction in the statistical spread in the delay time and in the discharge formation time, while the average discharge current has a significant effect on the burning voltage. The mechanism for the observed phenomena is interpreted qualitatively in terms of the presence of thin dielectric films on the cathode surface.
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N. V. Gavrilov, G. A. Mesyats, S. P. Nikulin et al., J. Vac. Sci. Technol. A 14, 1050 (1996).
N. V. Gavrilov, M. A. Zav’yalov, S. P. Nikulin et al., Pis’ma Zh. Tekh. Fiz. 19(21), 57 (1993) [Tech. Phys. Lett. 19(11), 689 (1993)].
N. V. Gavrilov and S. P. Nikulin, in Proceedings of the XVI International Symposium on Discharges and Electrical Insulation in Vacuum, edited by G. Mesyats, Proc. Soc. Photo-Opt. Intstrum. Eng. (SPIE) 2259 (1994), pp. 118–121.
N. V. Gavrilov and G. Mesyats, in Proceedings of the XXIII International Conference on Phenomena in Ionized Gases, edited by M. C. Bordage and A. Gleizes, Univ. P. Sabatier, Toulouse (1997), Vol. 2, pp. 32–33.
H. Paetow, Z. Physik, 111, 770–791 (1939).
V. Kudrle, E. Le Due, and M. Fitaire, in Proceedings of the XXIII International Conference on Phenomena in Ionized Gases, edited by M. C. Bordage and A. Gleizes, Univ. P. Sabatier, Toulouse (1997), Vol. 4, pp. 28–29.
Yu. A. Korolev and G. A. Mesyats, The Physics of Pulsed Breakdown in Gases [in Russian], Nauka, Moscow (1991).
N. V. Pleshivtsev, Cathode Sputtering, Atomizdat, Moscow (1968).
J. E. Houston and R. D. Bland, J. Appl. Phys. 44, 2504 (1973).
P. N. Chistyakov and N. V. Tatarinova, Zh. Tekh. Fiz. 35, 1333 (1965) [Sov. Phys. Tech. Phys. 10, 1035 (1965)].
M. Kaminsky, Atomic and Ionic Impact Phenomena on Metal Surfaces [Springer-Verlag, Berlin (1965); Mir, Moscow (1967), 506 pp.].
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Zh. Tekh. Fiz. 69, 20–24 (May 1999)
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Gavrilov, N.V., Romanov, S.E. Effect of cathode surface state on the characteristics of pulsed hollow-cathode glow discharges. Tech. Phys. 44, 497–500 (1999). https://doi.org/10.1134/1.1259372
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DOI: https://doi.org/10.1134/1.1259372