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Ellipsometry as a rapid method of establishing a correlation between the porosity and the gas sensitivity of tin dioxide layers

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Abstract

It is shown for the first time that reflection ellipsometry may be an effective method of establishing a correlation between the main parameters of gas-sensitive layers and their optical characteristics, suitable for rapid monitoring. This can advance the capability of predicting the properties of a material from its preparation conditions and consequently can reduce the optimization cycle time and thus lower the cost of a technology.

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Authors and Affiliations

  1. St. Petersburg State Electrical Engineering University, 197376, St. Petersburg, Russia

    D. Ts. Dimitrov, V. V. Luchinin, V. A. Moshnikov & M. V. Panov

Authors
  1. D. Ts. Dimitrov
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  2. V. V. Luchinin
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  3. V. A. Moshnikov
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  4. M. V. Panov
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Zh. Tekh. Fiz. 69, 129–130 (April 1999)

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Dimitrov, D.T., Luchinin, V.V., Moshnikov, V.A. et al. Ellipsometry as a rapid method of establishing a correlation between the porosity and the gas sensitivity of tin dioxide layers. Tech. Phys. 44, 468–469 (1999). https://doi.org/10.1134/1.1259325

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  • DOI: https://doi.org/10.1134/1.1259325

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