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Numerical calculation of the heavy-ion energy spectrum in the cathode sheath of a glow discharge in a gas mixture

  • Gas Discharges, Plasmas
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Abstract

A numerical method is developed for solving the equation for the heavy-ion total-energy distribution function in the cathode sheath of a glow discharge in an inert-gas mixture which requires much less computer time than the Monte Carlo method. It is shown that it allows one to calculate with satisfactory accuracy the energy spectrum of the heavy ions bombarding the cathode in glow-discharge devices.

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Authors and Affiliations

  1. Scientific-Research Institute of Materials for Electronics Technology, 248650, Kaluga, Russia

    V. I. Kristya

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  1. V. I. Kristya
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Zh. Tekh. Fiz. 68, 56–59 (June 1998)

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Kristya, V.I. Numerical calculation of the heavy-ion energy spectrum in the cathode sheath of a glow discharge in a gas mixture. Tech. Phys. 43, 664–667 (1998). https://doi.org/10.1134/1.1259050

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  • DOI: https://doi.org/10.1134/1.1259050

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