Abstract
Kinetic transport theory is used to find analytical expressions for the absorbed doses of the primary-particle flux and primary-particle energy as functions of distance into a solid with finite or semi-infinite thickness when the surface of the latter is irradiated by a flux of accelerated ions (atoms) in the direction normal to the surface. The theory was compared with experiments in which solid silicon films with thicknesses 50, 100, and 400 nm were irradiated by a flux of accelerated boron atoms with energies from 10 to 20 keV. These expressions were used to calculate the depth distribution of vacancies generated in a solid whose surface is irradiated by a flux of accelerated ions. The method developed can be used to determine the depth distribution of vacancies created by fluxes of accelerated electrons, neutrons, or photons.
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Zh. Tekh. Fiz. 68, 60–65 (April 1998)
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Kornyushkin, Y.D. Depth distribution of vacancies generated by irradiating a solid surface with a flux of accelerated ions. Tech. Phys. 43, 402–406 (1998). https://doi.org/10.1134/1.1258994
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DOI: https://doi.org/10.1134/1.1258994