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Properties of diamondlike films obtained in a barrier discharge at atmospheric pressure

  • Surfaces, Electron and Ion Emission
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Abstract

Diamondlike films are synthesized from gaseous hydrocarbons in a barrier discharge at atmospheric pressure. The films were investigated using transmission electron microscopy, electron diffraction, and infrared spectroscopy. A technique for determining the quantitative characteristics of the films (hydrogen content, ratio of different types of carbon-carbon bonds and hydrocarbon groups) using standard samples is described. The highest-quality films were obtained from methane (ratio of hydrogen to carbon atoms H/C=1.04, fraction of diamondlike to graphitelike bonds sp 3: sp 2=100%: 0%) and from a mixture of acetylene and hydrogen in the ratio 1:19 (H/C=0.73, sp 3: sp 2=68%: 32%).

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Authors and Affiliations

  1. Institute of High-Current Electronics, Siberian Branch of the Russian Academy of Sciences, 634055, Tomsk, Russia

    S. P. Bugaev, A. D. Korotaev, K. V. Oskomov & N. S. Sochugov

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  1. S. P. Bugaev
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  2. A. D. Korotaev
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  3. K. V. Oskomov
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  4. N. S. Sochugov
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Zh. Tekh. Fiz. 67, 100–104 (August 1997)

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Bugaev, S.P., Korotaev, A.D., Oskomov, K.V. et al. Properties of diamondlike films obtained in a barrier discharge at atmospheric pressure. Tech. Phys. 42, 945–949 (1997). https://doi.org/10.1134/1.1258759

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  • DOI: https://doi.org/10.1134/1.1258759

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