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Dynamics of the growth and mechanism of formation of laser-induced ordered relief on a silicon surface under the influence of polarized radiation

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References

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Authors and Affiliations

  1. Scientific-Research Institute of Complex Tests of Optoelectronic Instruments, 188537, Sosnovyi Bor, Leningrad Province, Russia

    O. P. Gashkov, M. N. Libenson, V. S. Makin, Yu. I. Pestov & V. V. Trubaev

Authors
  1. O. P. Gashkov
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  2. M. N. Libenson
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  3. V. S. Makin
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  4. Yu. I. Pestov
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  5. V. V. Trubaev
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Zh. Tekh. Fiz. 67, 113–116 (April 1997)

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Gashkov, O.P., Libenson, M.N., Makin, V.S. et al. Dynamics of the growth and mechanism of formation of laser-induced ordered relief on a silicon surface under the influence of polarized radiation. Tech. Phys. 42, 427–429 (1997). https://doi.org/10.1134/1.1258697

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  • DOI: https://doi.org/10.1134/1.1258697

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