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Preparation of high-quality epitaxial silicon layers by vapor-phase epitaxy

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References

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Authors and Affiliations

  1. Kherson Industrial Institute, 325008, Kherson, Ukraine

    N. A. Samoilov, A. V. Eliseev & S. V. Shutov

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  1. N. A. Samoilov
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  2. A. V. Eliseev
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  3. S. V. Shutov
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Zh. Tekh. Fiz. 67, 132–133 (February 1997)

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Samoilov, N.A., Eliseev, A.V. & Shutov, S.V. Preparation of high-quality epitaxial silicon layers by vapor-phase epitaxy. Tech. Phys. 42, 241–242 (1997). https://doi.org/10.1134/1.1258609

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  • DOI: https://doi.org/10.1134/1.1258609

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