Abstract
In order to improve the accuracy of the microindentation mechanism, experimental data on the influence of the spectral composition and intensity of light on the microhardness of single-crystal Si and theoretical calculations have been analyzed to establish that a thin layer of high hardness exists near the surface of Si. This layer has a different influence on the microhardness, depending upon how deeply the indenter penetrates into the substance.
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Fiz. Tverd. Tela (St. Petersburg) 41, 1225–1227 (July 1999)
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Gerasimov, A.B., Chiradze, G.D., Kutivadze, N.G. et al. Determining the microhardness throughout the depth in a sample. Phys. Solid State 41, 1115–1117 (1999). https://doi.org/10.1134/1.1130949
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DOI: https://doi.org/10.1134/1.1130949