Laser-induced passivation of porous glass to protect it from chemical degradation and aging

  • M. M. Sergeev
  • G. K. Kostyuk
  • R. A. Zakoldaev
  • E. B. Yakovlev
Nanoscale and Nanostructured Materials and Coatings

Abstract

A technique for forming thermally densified layers on opposite wafer surfaces so as to retain a complex well-developed structure of porous glass wafers is proposed. These thermally densified layers passivate and protect porous glass from chemical degradation and aging. The process involves the formation of thermally densified layers and removal of graphite particles from these layers. The formation of a thermally densified layer on the surface of a porous glass wafer was induced by an ytterbium fiber laser with wavelength λ = 1.06 μm, pulse duration τ = 100 ns, and pulse repetition frequency ν = 30–50 kHz. Graphite particles were removed from the surface of porous glass wafers on the same laser setup model. Even 10 months after the thermally densified layers had been formed, loss in transmittance in the entire wavelength range was less than 5–7%. The results of examining the surface relief of porous glass wafers before and after a thermally densified layer had been formed on a scanning probe microscope with an arbitrary selection of 500 × 500-nm scanning areas are presented.

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Copyright information

© Pleiades Publishing, Ltd. 2015

Authors and Affiliations

  • M. M. Sergeev
    • 1
  • G. K. Kostyuk
    • 1
  • R. A. Zakoldaev
    • 1
  • E. B. Yakovlev
    • 1
  1. 1.ITMO UniversitySt. PetersburgRussia

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