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Physical and chemical processes in gas-discharge plasma during the deposition of nanocarbon films

  • R. R. Ismagilov
  • A. P. Volkov
  • P. V. Shvets
  • A. N. Obraztsov
Physicochemical Processes at the Interfaces

Abstract

The relationship of the parameters of activated methane-hydrogen mixture with the phase composition and structural features was determined for carbon films, which were precipitated from this mixture. Optical emission spectra of dc discharge were studied in conditions of the growth of different nanocarbon films. The peculiarities of the space intensity distribution of radiation corresponding to carbon C2 dimers are shown.

Keywords

Glow Discharge Methane Concentration Plasma Column Plasma Radiation Interelectrode Space 
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Copyright information

© Pleiades Publishing, Ltd. 2009

Authors and Affiliations

  • R. R. Ismagilov
    • 1
  • A. P. Volkov
    • 1
  • P. V. Shvets
    • 1
  • A. N. Obraztsov
    • 1
  1. 1.Department of PhysicsMoscow State UniversityMoscowRussia

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