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Deposition of Films from a Mixture of Hexamethylcyclotrisilazane Vapor and Argon in Inductively Coupled Plasma

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In an inductively coupled high-frequency discharge plasma, SiCxNy:H films are obtained from a mixture of hexamethylcyclotrisilazane vapor and argon at substrate temperatures of 100 to 400°C and a discharge power of 200 W. The simplest plasma components (nitrogen, cyan, silicon atoms, CH free radicals, and C2 dimers) are determined. Some physicochemical properties of the films, including the growth rate, types of chemical bonds, refractive index, transparency interval, and contact angle, are studied. The synthesized films have a polymer-like structure.

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We thank Yu.M. Rumyantsev for discussing the results of the work and I.V. Yushina for obtaining the sample transmission spectra.


This work was carried out within the state assignment of the Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences.

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Correspondence to V. R. Shayapov.

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Translated by L. Mosina

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Shayapov, V.R., Chagin, M.N., Kolodin, A.N. et al. Deposition of Films from a Mixture of Hexamethylcyclotrisilazane Vapor and Argon in Inductively Coupled Plasma. Glass Phys Chem 45, 525–531 (2019). https://doi.org/10.1134/S108765961906018X

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  • silicon carbonitride
  • hexamethylcyclotrisilazane
  • emission spectroscopy