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Thermoelastic properties of micron-size actuators based on the Ti2NiCu//Pt composite with shape-memory effect

  • P. V. Mazaev
  • V. V. KoledovEmail author
  • V. G. Shavrov
  • P. V. LegaEmail author
  • A. V. Mashirov
  • A. P. Kamantsev
  • D. S. Kuchin
  • D. V. Kolesov
  • I. V. Yaminskii
  • D. I. Zakharov
  • V. A. Dikan
  • A. V. Irzhak
Physical Processes in Electron Devices
  • 38 Downloads

Abstract

Thermomechanical properties of microactuators with shape-memory effect (SME) based on the Ti2NiCu/Pt layered composite are analyzed. Atomic-force microscopy is used to experimentally determine rigidity of the composite microactuators that represent cantilevers with sizes of 50 × 2 × 1 μm and a thickness of the SME active alloy layer of 0.5 μm in a temperature interval of 20–100°C. Forces that are exerted by the composite actuator on a microscopic object are quantitatively estimated. The experimental data are in reasonable agreement with the calculated results.

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References

  1. 1.
    A. Irzhak, V. Koledov, D. Zakharov, et al., J. Alloys Compd. 586 (Suppl. 1), S464 (2014).CrossRefGoogle Scholar
  2. 2.
    S. P. Belyaev, N. N. Resnina, A. V. Irzhak, et al., J. Alloys Compd. 586 (Suppl. 1), 222 (2014).CrossRefGoogle Scholar
  3. 3.
    A. V. Shelyakov, N. N. Sitnikov, V. V. Koledov, et al., Int. J. Smart Nano Materials 2 (2), 68 (2011).CrossRefGoogle Scholar
  4. 4.
    D. Zakharov, G. Lebedev, A. Irzhak, et al., Smart Materials Structures 21, 052001 (2012).CrossRefGoogle Scholar
  5. 5.
    A. V. Shelyakov, N. N. Sitnikov, A. P. Menushenkov, et al., Thin Solid Films 519, 5314 (2011).CrossRefGoogle Scholar
  6. 6.
    D. Zakharov, G. Lebedev, V. Koledov, et al., Phys. Procedia 10, 58 (2010).CrossRefGoogle Scholar
  7. 7.
    A. V. Irzhak, D. I. Zakharov, V. S. Kalashnikov, V. V. Koledov, D. S. Kuchin, G. A. Lebedev, P. V. Lega, E. P. Perov, N. A. Pikhtin, V. G. Pushin, I. S. Tarasov, V. V. Khovailo, V. G. Shavrov, and A. V. Shelyakov, J. Commun. Technol. Electron. 55, 818 (2010).CrossRefGoogle Scholar
  8. 8.
    A. V. Irzhak, V. S. Kalashnikov, V. V. Koledov, D. S. Kuchin, G. A. Lebedev, P. V. Lega, N. A. Pikhtin, I. S. Tarasov, V. G. Shavrov, and A. V. Shelyakov, Tech. Phys. Lett. 36, 329 (2010).CrossRefGoogle Scholar
  9. 9.
    A. D. Bozhko, A. N. Vasil’ev, V. V. Khovailo, et al., JETP Lett. 67 (3), 227 (1998).CrossRefGoogle Scholar
  10. 10.
    A. Vasil’ev, A. Bozhko, V. Khovailo, et al., J. Magn. Magn. Mater. 196–197, 837 (1999).CrossRefGoogle Scholar
  11. 11.
    V. Buchelnikov, I. Dikshtein, R. Grechishkin, et al., J. Magn. Magn. Mater. 272–276, 2025 (2004).CrossRefGoogle Scholar
  12. 12.
    I. Dikshtein, V. Koledov, V. Shavrov, et al., IEEE Trans. Magn. 35, 3811 (1999).CrossRefGoogle Scholar
  13. 13.
    N. I. Kourov, A. V. Korolev, V. G. Pushin, et al., Phys. Met. Metallogr. 99 (4), 376 (2005).Google Scholar
  14. 14.
    V. G. Pushin, N. I. Kourov, A. V. Korolev, et al., Phys. Met. Metallogr. 99(4), 401 (65).Google Scholar
  15. 15.
    I. E. Dikshten, D. I. Ermakov, V. V. Koledov, L. V. Koledov, T. Takagi, A. A. Tulakova, A. A. Cherechukin, and V. G. Shavrov, JETP Lett. 72, 373 (2000).CrossRefGoogle Scholar
  16. 16.
    A. A. Cherechukin, I. E. Dikshtein, D. I. Ermakov et al., Phys. Lett. A 291 (2–3), 175 (2001).CrossRefGoogle Scholar
  17. 17.
    E. Kalimullina, A. Kamantsev, V. Koledov, et al., Phys. Status Solidi 11, 1023 (2014).CrossRefGoogle Scholar
  18. 18.
    V. D. Buchel’nikov, A. N. Vasil’ev, V. V. Koledov, et al., PHYSICS-USPEKHI 49, 871 (2006).CrossRefGoogle Scholar
  19. 19.
    R. S. Gates and M. G. Reitsma, Rev. Sci. Instrum. 78, 086101 (2007).CrossRefGoogle Scholar
  20. 20.
    A. D. Slattery, A. J. Blanch, J. S. Quinton, and C. T. Gibson, Nanotecnology 24, 015710 (2013).CrossRefGoogle Scholar
  21. 21.
    http://www.nanoscopy.ru/equipment/femtoscan/Google Scholar
  22. 22.
    S. D. Ponomarev and L. E. Andreeva, Calculation of Elastic Elements of Machines and Devices (Mashino-stroenie, Moscow, 1962) [in Russian].Google Scholar
  23. 23.
    A. V. Bolshakova, O. I. Kiselyova, A. S. Filonov, et al., Ultramicroscopy 86 (1–2), 121 (2001).CrossRefGoogle Scholar
  24. 24.
    A. V. Bolshakova, O. I. Kiselyova, and I. V. Yaminsky, Biotechnol. Progress 20, 1615 (2004).CrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Inc. 2016

Authors and Affiliations

  • P. V. Mazaev
    • 1
  • V. V. Koledov
    • 1
    Email author
  • V. G. Shavrov
    • 1
  • P. V. Lega
    • 1
    Email author
  • A. V. Mashirov
    • 1
  • A. P. Kamantsev
    • 1
  • D. S. Kuchin
    • 1
  • D. V. Kolesov
    • 2
  • I. V. Yaminskii
    • 2
  • D. I. Zakharov
    • 3
  • V. A. Dikan
    • 3
  • A. V. Irzhak
    • 3
    • 4
  1. 1.Kotel’nikov Institute of Radio Engineering and ElectronicsRussian Academy of SciencesMoscowRussia
  2. 2.Moscow State UniversityMoscowRussia
  3. 3.National Research Technological University MISiSMoscowRussia
  4. 4.Institute of Microelectronic Technology and Ultrahigh-Purity MaterialsRussian Academy of SciencesChernogolovkaRussia

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