Advertisement

Technical Physics Letters

, Volume 44, Issue 10, pp 946–948 | Cite as

Correlated Variation of Electrical Characteristics of a Thin-Film Field-Effect Transistor during Modification of the Physical Properties of an InZnO:N Oxide Semiconductor Channel

  • A. B. CheremisinEmail author
  • N. A. Kuldin
Article
  • 9 Downloads

Abstract

We have studied changes in the transmission and current–voltage characteristics of a thin-film field-effect transistor (TFT) during modification of the physical properties of its oxide semiconductor channel based on InZnO:N layer. Modification of the electrical parameters of the device was based on the phenomenon of photoinduced charge accumulation in the semiconductor. It is established that the slopes and intercepts of the capacitance–voltage (CGVG) and transmission (IDVG) curves of the TFT under illumination exhibit correlated similar variations. The obtained results justify joint use of the CGVG and IDVG curves in the analysis of peculiarities of the energy band structure of oxide semiconductors.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    J. Y. Kwon and J. K. Jeong, Semicond. Sci. Technol. 30, 024002 (2015).ADSCrossRefGoogle Scholar
  2. 2.
    M. Kimura, T. Nakanishi, K. Nomura, T. Kamiya, and H. Hosono, Appl. Phys. Lett. 92, 133512 (2008).ADSCrossRefGoogle Scholar
  3. 3.
    J.-H. Park, K. Jeon, S. Lee, S. Kim, S. Kim, I. Song, C. J. Kim, J. Park, Y. Park, D. M. Kim, and D. H. Kim, IEEE Electron Dev. Lett. 29, 1292 (2008).ADSCrossRefGoogle Scholar
  4. 4.
    L. Qiang and R.-H. Yao, J. Display Technol. 11, 325 (2015).ADSCrossRefGoogle Scholar
  5. 5.
    H. Lee, J. Kim, S. Choi, S. K. Kim, J. Kim, J. Park, S.-J. Choi, D. H. Kim, and D. M. Kim, IEEE Electron Dev. Lett. 38, 199 (2017).ADSCrossRefGoogle Scholar
  6. 6.
    A. B. Cheremisin, S. N. Kuznetsov, and G. B. Stefanovich, Semicond. Sci. Technol. 31, 105011 (2016).ADSCrossRefGoogle Scholar
  7. 7.
    M. Li, L. Lan, M. Xu, H. Xu, D. Luo, P. Xiao, and J. Peng, Solid-State Electron. 91, 9 (2014).ADSCrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  1. 1.Petrozavodsk State UniversityPetrozavodskRussia

Personalised recommendations