Technical Physics Letters

, Volume 38, Issue 1, pp 38–41 | Cite as

Structural characterization of AlGaN/GaN superlattices by three-beam X-ray diffraction

Article

Abstract

Three-beam X-ray diffraction in AlGaN/GaN superlattices (SLs) grown by metalorganic chemical vapor deposition on c-sapphire has been measured in the Renninger scheme. The primary beam corresponds to a forbidden 0001 reflection. Then, θ-scan curves were measured at the maximum of each three-beam diffraction peak. The average parameters a and c of SLs have been determined using the angular positions of three-beam diffraction peaks on the Renninger diagram (φ-scan curves). It is shown that a diffraction pattern with satellites on the θ-2θ curve of 0001 reflection can be obtained in the azimuthal position of three-beam diffraction. The angular widths of three-beam diffraction peaks measured in both φ and θ scans have been analyzed as related to the defect structure of layers. On this basis, a new method of determining the structural parameters of SLs is proposed.

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Copyright information

© Pleiades Publishing, Ltd. 2012

Authors and Affiliations

  1. 1.Ioffe Physical Technical InstituteRussian Academy of SciencesSt. PetersburgRussia

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