Stoichiometry, phase composition, and properties of superhard nanostructured Ti-Hf-Si-N coatings obtained by deposition from high-frequency vacuum-arc discharge

  • A. D. Pogrebnyak
  • A. P. Shpak
  • V. M. Beresnev
  • G. V. Kirik
  • D. A. Kolesnikov
  • F. F. Komarov
  • P. Konarski
  • N. A. Makhmudov
  • M. V. Kaverin
  • V. V. Grudnitskii
Article

Abstract

Superhard nanostructured Ti-Hf-Si-N coatings (films) possessing high mechanical properties were obtained by deposition from high-frequency vacuum-arc discharge. The elemental and phase composition and morphology of the films were studied by a combination of methods including RBS, SIMS, GDMS, SEM-EDXS, XRD and nanoindentation techniques at various pressures and bias voltages applied to the coated samples. It is established that, as the average grain size in nc-(Ti,Hf)N (nanocrystalline) coatings decreases from 6.7 to 5 nm and a-Si3N4 (amophous or quasi-amorphous phase) interlayers are formed between the nanograins, the nanohardness of coatings increases from 42.7 to 48.4–1.6 GPa. However, the further grain refinement of nc-(Ti,Hf)N to 4.0 nm leads to a slight decrease in the nanohardness. The stoichiometry of the coatings changes from (Ti25-Hf12.5-Si12.5)N50 to (Ti28-Hf18-Si9)N45, which is accompanied by variation of the lattice parameter of (Ti,Hf)N solid solution grains.

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Copyright information

© Pleiades Publishing, Ltd. 2011

Authors and Affiliations

  • A. D. Pogrebnyak
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  • A. P. Shpak
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  • V. M. Beresnev
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  • G. V. Kirik
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  • D. A. Kolesnikov
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  • F. F. Komarov
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  • P. Konarski
    • 1
    • 2
    • 3
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    • 5
    • 6
    • 7
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    • 9
  • N. A. Makhmudov
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  • M. V. Kaverin
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  • V. V. Grudnitskii
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
    • 7
    • 8
    • 9
  1. 1.Sumy National UniversitySumyUkraine
  2. 2.Sumy Institute of Surface ModificationSumyUkraine
  3. 3.Kurdyumov Institute of Metal PhysicsNational Academy of Sciences of UkraineKievUkraine
  4. 4.Kharkiv National UniversityKharkivUkraine
  5. 5.Ukrrosmetall CorporationSumyUkraine
  6. 6.Belgorod State UniversityBelgorodRussia
  7. 7.Belarusian State UniversityMinskBelarus
  8. 8.Tele & Radio Research InstituteWarsawPoland
  9. 9.Tashkent University of Informatics (Samarkand Branch)SamarkandUzbekistan

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