Advertisement

Technical Physics Letters

, 35:925 | Cite as

Features of the structural state and mechanical properties of ZrN and Zr(Ti)-Si-N coatings obtained by ion-plasma deposition technique

  • A. D. Pogrebnyak
  • O. V. Sobol’
  • V. M. Beresnev
  • P. V. Turbin
  • S. N. Dub
  • G. V. Kirik
  • A. E. Dmitrenko
Article

Abstract

The possibility of obtaining hard nanocrystalline coatings using vacuum-arc deposition in a high-frequency discharge stimulated regime has been studied. Condensates of the Zr(Ti)-Si-N system obtained by this method contain ZrN and TiN crystalline grains. These grains exhibit a compressive strain of about −1.1% in the film growth plane, which corresponds to compressive stresses up to about 3.5 GPa in the film-substrate system. The results of nanoindentation show evidence for a strong inhomogeneity of the coatings, in which regions possessing a hardness of 29–30 GPa alternate with those where the hardness exceeds 45–47 GPa. This pattern agrees with a two-phase model based on the structural data, according to which the condensed material consists of less hard ZrN grains and harder TiN grains.

PACS numbers

62.20.Qp 68.47.Gh 68.60.Bs 

References

  1. 1.
    S. Veprek, M. G. J. Veprek-Heijman, P. Karvankova, and J. Prochazka, Thin Solid Films 476, 1 (2005).CrossRefADSGoogle Scholar
  2. 2.
    O.V. Sobol’, Fiz. Tverd. Tela (St. Petersburg) 49, 1104 (2007) [Phys. Solid State 49, 1161 (2007)].Google Scholar
  3. 3.
    A. D. Pogrebnyak, A. P. Shpak, N. A. Azarenkov, and V. M. Beresnev, Usp. Fiz. Nauk 170, 35 (2009) [Phys. Usp. 52, 2 (2009)].CrossRefGoogle Scholar
  4. 4.
    V. M. Beresnev, D. L. Perlov, and A. I. Fedorenko, Ecologically Safe Vacuum-Plasma Equipment and Coating Technologies (KhISPI, Kharkiv, 2003) [in Russian].Google Scholar
  5. 5.
    S. N. Dub and N. V. Novikov, Sverkhtverd. Mater., No. 6, 16 (2004).Google Scholar
  6. 6.
    O. V. Sobol’, Fiz. Met. Metalloved. 91, 63 (2001).Google Scholar
  7. 7.
    A. S. Bolgar and V. F. Litvinenko, Thermodynamic Properties of Nitrides (Naukova Dumka, Kiev, 1980) [in Russian].Google Scholar
  8. 8.
    A.D. Pogrebnjak, M. M. Danilenok, A. A. Drobyshevskaya, et al., Vacuum 83, S235 (2009).CrossRefGoogle Scholar
  9. 9.
    V. V. Uglov, V. M. Anishcik, S. V. Zlotski, et al., Surf. Coat. Technol. 202, 2394 (2008).CrossRefGoogle Scholar
  10. 10.
    J. Musil, P. Baroch, and P. Zeman, in Hard Nanocomposite Coatings: Present Status and Trends, Ed. by R. Wei (Signpost Publ., 2007), Chapter 1.Google Scholar
  11. 11.
    S. Veprek, A. S. Argon, and R. F. Zhang, Phil. Mag. Lett. 87, 955 (2007).CrossRefADSGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2009

Authors and Affiliations

  • A. D. Pogrebnyak
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
  • O. V. Sobol’
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
  • V. M. Beresnev
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
  • P. V. Turbin
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
  • S. N. Dub
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
  • G. V. Kirik
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
  • A. E. Dmitrenko
    • 1
    • 2
    • 3
    • 4
    • 5
    • 6
  1. 1.Sumy Institute of Surface ModificationSumyUkraine
  2. 2.Kharkiv Polytechnical Institute (National Technical University)KharkivUkraine
  3. 3.Scientific Physical-Technical Center of the Ministry of Education and Science and the National Academy of Sciences of UkraineKharkivUkraine
  4. 4.Bakul Institute for Superhard MaterialsNational Academy of Sciences of UkraineKievUkraine
  5. 5.Sumy National Agrarian UniversitySumyUkraine
  6. 6.Kharkiv Institute of Physics and TechnologyNational Scientific CenterKharkivUkraine

Personalised recommendations