Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes
The technological prospects for the creation of a system of microfocus X-ray tubes with the use of silicon field emission of nanocathodes have been discussed. A numerical analysis of the field-emission current from a nanoscale semiconductor cathode regulated by voltage on a grid electrode has been carried out on the basis of which a scheme for controlling the elements of the matrix of field-emission cathode assemblies has been proposed. The current–voltage characteristics of silicon field emission nanocathodes have been measured. They are in good agreement with the theoretical estimates of the field-emission current. A full technological cycle of the development of elements of microfocus X-ray tubes (a set of field-emission cathode assemblies and a set of anode assemblies) has been performed. The results can be used to create systems of microfocus X-ray tubes for nanolithographic equipment of a new generation.
The work was performed by a group of authors, which includes N.A. Djuzhev, G.D. Demin, N.A. Filippov, I.D. Evsikov, P.Yu. Glagolev, M.A. Makhiboroda, N.I. Chkhalo, and N.N. Salashchenko, who used the equipment of the Collective Use Center Microsystem Technology and Electronic Component Base, National Research University of Electronic Technology, supported by the Ministry of Education and Science of Russia as part of project 14.578.21.0250, RFMEFI57817X0250 using the Center for National Technology Initiative Sensory.
CONFLICT OF INTEREST
The authors state that they do not have any conflicts of interest.
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