Technical Physics

, Volume 64, Issue 11, pp 1590–1595 | Cite as

Optical, Mechanical, and Thermal Properties of Free-Standing MoSi2Nx and ZrSi2Ny Nanocomposite Films

  • S. Yu. Zuev
  • A. Ya. Lopatin
  • V. I. Luchin
  • N. N. Salashchenko
  • D. A. Tatarskiy
  • N. N. TsybinEmail author
  • N. I. Chkhalo


The optical, mechanical, and thermal properties of free-standing structures based on nitrided molybdenum and zirconium silicides have been studied. It has been shown that silicide nitriding considerably improves the thermal stability of films. While as-prepared amorphous MoSi2 and ZrSi2 films crystallize in the interval 330–370°C, nitriding of films has made it possible to increase their working temperatures in vacuum to 600–700°C (at least, for x ≥ 0.25, y ≥ 1.3). Tensile tests have shown that the ultimate strength of MoSi2Nx films (0 ≤ x ≤ 0.55) depends on nitrogen content only slightly. Comparison between the properties of MoSi2Nx and ZrSi2Ny films magnetron-sputtered at the same partial pressure of nitrogen has demonstrated that with transmission coefficients of films at a wavelength of 13.5 nm being close to each other, ZrSi2 films are more effective as protection coatings (they are less prone to oxidation and more degradation-resistant).



This study was carried out using equipment from the Center of Collective Use Physics and Technology of Micro- and Nanostructures, Institute of Physics of Microstructures, Russian Academy of Sciences (Nizhny Novgorod, Russia).


This study was supported financially by the Russian Foundation for Basic Research (project nos. 18-42-52007 and 19-07-00173).


The authors claim that do not have any conflicts of interest.


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Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  • S. Yu. Zuev
    • 1
  • A. Ya. Lopatin
    • 1
  • V. I. Luchin
    • 1
  • N. N. Salashchenko
    • 1
  • D. A. Tatarskiy
    • 1
  • N. N. Tsybin
    • 1
    Email author
  • N. I. Chkhalo
    • 1
  1. 1.Institute for Physics of Microstructures, Russian Academy of SciencesNizhny NovgorodRussia

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