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Technical Physics

, Volume 64, Issue 11, pp 1698–1703 | Cite as

Measurement Error of Interferometers with Diffraction Reference Wave

  • A. A. Akhsakhalyan
  • D. A. Gavrilin
  • I. V. Malyshev
  • N. N. Salashchenko
  • M. N. ToropovEmail author
  • B. A. Ulasevich
  • N. N. Tsybin
  • N. I. Chkhalo
Article

Abstract

An experimental setup and results on aberration of sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a subwavelength output aperture obtained with the aid of an optical part of recording system (OPRS) are presented. SRSW and OPRS are developed for referenceless interferometer with diffraction reference wave. Methods for minimization of the measurement error are proposed. The SRSW and OPRS provide subnanometer measurement accuracy for optics. An increase in the measurement accuracy of the interferometer to a picometer level is discussed.

Notes

ACKNOWLEDGMENTS

This work was performed using the equipment of the shared facility of the Institute for Physics of Microstructures.

FUNDING

This work was supported by the Ministry of Education and Science of the Russian Federation (contract no. 075-02-2018-182 (RFMEFI60418X0202)).

CONFLICT OF INTEREST

The authors declare that there is no conflict of interest.

REFERENCES

  1. 1.
    D. Malacara, Optical Shop Testing, 2nd ed. (Wiley, New York, 1992).Google Scholar
  2. 2.
    http://www.zygo.com.Google Scholar
  3. 3.
    M. M. Barysheva, N. I. Chkhalo, A. E. Pestov, N. N. Salashchenko, M. N. Toropov, and M. N. Zorina, in Fundamentals of Picoscience, Ed. by K. D. Sattler (CRC, 2013), p. 595.Google Scholar
  4. 4.
    H.-G. Rhee, H. Kihm, H.-S. Yang, Y.-S. Ghim, and Y.-W. Lee, J. Korean Phys. Soc. 65, 1385 (2014).ADSCrossRefGoogle Scholar
  5. 5.
    I. V. Malyshev, N. I. Chkhalo, M. N. Toropov, N. N. Salashchenko, A. E. Pestov, S. V. Kuzin, and V. N. Polkovnikov, Proc. SPIE 10235, 102350C (2017).CrossRefGoogle Scholar
  6. 6.
    G. E. Sommargren, Laser Focus World 8, 61 (1996).Google Scholar
  7. 7.
    P. P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, Appl. Opt. 38, 7252 (1999).ADSCrossRefGoogle Scholar
  8. 8.
    K. Otaki, K. Ota, I. Nishiyama, T. Yamamoto, Y. Fukuda, and S. Okazaki, J. Vac. Sci. Technol. B 20, 2449 (2002).CrossRefGoogle Scholar
  9. 9.
    N. I. Chkhalo, A. E. Pestov, N. N. Salashchenko, and M. N. Toropov, in Lithography, Ed. by M. Wang (Intech, 2010), Chap. 6. https://www.intechopen.com/ books/lithography/manufacturing-and-investigating-objective-lens-for-ultrahigh-resolution-lithography-facilities.Google Scholar
  10. 10.
    N. N. Salashchenko, M. N. Toropov, and N. I. Chkhalo, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 2, 511 (2008).CrossRefGoogle Scholar
  11. 11.
    M. M. Barysheva, A. E. Pestov, N. N. Salashchenko, M. N. Toropov, and N. I. Chkhalo, Phys.-Usp. 55, 681 (2012).CrossRefGoogle Scholar
  12. 12.
    N. I. Chkhalo, A. Yu. Klimov, V. V. Rogov, N. N. Salashchenko, and M. N. Toropov, Rev. Sci. Instrum. 79, 033107 (2008).ADSCrossRefGoogle Scholar
  13. 13.
    N. I. Chkhalo, I. V. Malyshev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, M. N. Toropov, and A. A. Soloviev, Appl. Opt. 55, 619 (2016).ADSCrossRefGoogle Scholar
  14. 14.
    D. Wang, X. Chen, Y. Xu, F. Wang, M. Kong, J. Zhao, and B. Zhang, Opt. Express 22, 25550 (2014).ADSCrossRefGoogle Scholar
  15. 15.
    N. I. Chkhalo, M. N. Toropov, N. N. Salashchenko, and M. V. Zorina, Opt. Lett. 40, 159 (2015).ADSCrossRefGoogle Scholar
  16. 16.
    D. Wang, Y. Xu, R. Liang, M. Kong, J. Zhao, B. Zhang, and W. Li, Opt. Express 24, 7079 (2016).ADSCrossRefGoogle Scholar
  17. 17.
    M. V. Svechnikov, N. I. Chkhalo, M. N. Toropov, and N. N. Salashchenko, Opt. Express 23, 14677 (2015).ADSCrossRefGoogle Scholar
  18. 18.
    V. N. Mahajan, Proc. SPIE 5173, 517302 (2003).Google Scholar

Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  • A. A. Akhsakhalyan
    • 1
  • D. A. Gavrilin
    • 1
  • I. V. Malyshev
    • 1
  • N. N. Salashchenko
    • 1
  • M. N. Toropov
    • 1
    Email author
  • B. A. Ulasevich
    • 1
  • N. N. Tsybin
    • 1
  • N. I. Chkhalo
    • 1
  1. 1.Institute for Physics of Microstructures, Russian Academy of SciencesNizhny NovgorodRussia

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