Advertisement

Technical Physics

, Volume 63, Issue 12, pp 1824–1828 | Cite as

Features of the Frequency Dependence of Capacitance–Voltage Characteristics of a Semiconductor Structure of a Photoelectric Converter Based on a pn Junction with an Antireflective Film of Porous Silicon

  • V. V. TregulovEmail author
SOLID STATE ELECTRONICS
  • 3 Downloads

Abstract

The frequency dependence of capacitance–voltage characteristics of a semiconductor structure with an antireflective film of porous silicon, which was formed by electrochemical etching above a pn junction, is studied. Photoluminescence spectra of layers of porous silicon of the experimental samples are also examined. It is demonstrated that the capacitance–voltage curves are shaped by competing influences of capacitances of the pn junction and the surface structure forming in a porous Si film due to its inhomogeneity. A structural model of layers of the studied semiconductor structure and a capacitance equivalent circuit are proposed.

Notes

REFERENCES

  1. 1.
    Handbook of Porous Silicon, Ed. by L. Canham (Springer, 2014).Google Scholar
  2. 2.
    J. P. Zheng, K. L. Jiao, and W. P. Shen, Appl. Phys. Lett. 61, 459 (1992).ADSCrossRefGoogle Scholar
  3. 3.
    V. V. Tregulov, Tech. Phys. 59, 1413 (2014).CrossRefGoogle Scholar
  4. 4.
    V. V. Tregulov, V. A. Stepanov, V. G. Litvinov, and A. V. Ermachikhin, Tech. Phys. 61, 1694 (2016).CrossRefGoogle Scholar
  5. 5.
    V. V. Tregulov, V. G. Litvinov, and A. V. Ermachikhin, Tech. Phys. Lett. 43, 955 (2017).ADSCrossRefGoogle Scholar
  6. 6.
    E. F. Venger, T. Ya. Gorbach, S. I. Kirillova, V. E. Primachenko, and V. A. Chernobai, Semiconductors 36, 330 (2002).ADSCrossRefGoogle Scholar
  7. 7.
    D. N. Goryachev, L. V. Belyakov, and O. M. Sreseli, Semiconductors 38, 712 (2004).ADSCrossRefGoogle Scholar
  8. 8.
    N. N. Melnik and V. V. Tregulov, Bull. Lebedev Phys. Inst. 42, 77 (2015).ADSCrossRefGoogle Scholar
  9. 9.
    D. N. Goryachev, L. V. Belyakov, and O. M. Sreseli, Semiconductors 37, 477 (2003).ADSCrossRefGoogle Scholar
  10. 10.
    A. A. Evtukh, E. B. Kaganovich, E. G. Manoilov, and N. A. Semenenko, Semiconductors 40, 175 (2006).ADSCrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  1. 1.Yesenin Ryazan State UniversityRyazanRussia

Personalised recommendations