Violation of the boltzmann distribution for plasma electron number density in two-chamber inductively coupled plasma discharges
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It is found for inductively coupled plasma (ICP) discharges in two-chamber structures in which a strong electron temperature gradient can be produced, the classical Boltzmann distribution for the electron number density does not exist even at qualitative level; a more general (extended Boltzmann) distribution for the electron energy density holds with a satisfactory accuracy.
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- 2.V. A. Rozhansky and L. D. Tsendin, Transport Phenomena in Partially Ionized Plasma (Taylor and Francis, London–New York, 2001).Google Scholar