Technical Physics

, Volume 60, Issue 10, pp 1570–1573 | Cite as

Violation of the boltzmann distribution for plasma electron number density in two-chamber inductively coupled plasma discharges

  • E. A. Bogdanov
  • A. A. Kudryavtsev
  • Z. S. Ochikova
  • A. S. Chirtsov
Short Communications

Abstract

It is found for inductively coupled plasma (ICP) discharges in two-chamber structures in which a strong electron temperature gradient can be produced, the classical Boltzmann distribution for the electron number density does not exist even at qualitative level; a more general (extended Boltzmann) distribution for the electron energy density holds with a satisfactory accuracy.

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References

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    M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Material Processing (Wiley, New York, 2005).CrossRefGoogle Scholar
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    V. A. Rozhansky and L. D. Tsendin, Transport Phenomena in Partially Ionized Plasma (Taylor and Francis, London–New York, 2001).Google Scholar
  3. 3.
    A. A. Kudryavtsev and K. Yu. Serditov, Phys. Plasmas 19, 073504 (2012).CrossRefADSGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2015

Authors and Affiliations

  • E. A. Bogdanov
    • 1
  • A. A. Kudryavtsev
    • 1
  • Z. S. Ochikova
    • 1
  • A. S. Chirtsov
    • 2
  1. 1.St. Petersburg State UniversitySt. PetersburgRussia
  2. 2.St. Petersburg National Research University of Information TechnologiesMechanics, and Optics (ITMO)St. PetersburgRussia

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