Effect of the deposition parameters on the structure and physicochemical properties of protective Al2O3 coatings
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Three series of Al2O3 coating samples are fabricated by microarc oxidation under various deposition conditions and are studied by scanning electron microscopy (SEM) in combination with energy-dispersive x-ray spectroscopy (EDXS), Rutherford backscattering, and X-ray diffraction. Defects and pores in the coatings are analyzed by positron annihilation spectroscopy at room temperature without vacuum. No nanometer pores are detected in the coatings. When changing the electrolyte-plasma oxidation conditions, one can change the concentration and the ratio of the types of vacancy defects in these Al2O3 coatings.
KeywordsPIXE Deposition Parameter Positron Lifetime Rutherford Backscattering Vacancy Defect
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