Physics of the Solid State

, Volume 57, Issue 7, pp 1342–1346 | Cite as

Deposition of β-Ga2O3 layers by sublimation on sapphire substrates of different orientations

  • V. N. Maslov
  • V. I. Nikolaev
  • V. M. Krymov
  • V. E. Bugrov
  • A. E. Romanov
Semiconductors

Abstract

Layers of β-Ga2O3 have been grown by sublimation on sapphire substrates of different orientations. The main features of the crystal growth, morphology of layers, and their composition have been studied.

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References

  1. 1.
    E. G. Villora, Kiyoshi Shimamura, Yukio Yoshikawa, Takekazu Ujiie, and Kazuo Aoki, Appl. Phys. Lett. 92(20), 202120 (2008).ADSCrossRefGoogle Scholar
  2. 2.
    H. Aida, K. Nishiguchi, H. Takeda, N. Aota, K. Sunakawa, and Y. Yaguchi, J. Appl. Phys. 47(11), 8506 (2008).CrossRefGoogle Scholar
  3. 3.
    Liu Yang, Ma Jiamping, Liu Fuli, Zang Yuan, and Liu Yantao, J. Semicond. 35(3), 033001–1 (2014).ADSCrossRefGoogle Scholar
  4. 4.
    V. N. Maslov, V. M. Krymov, M. N. Blashenkov, A. A. Golovatenko, and V. I. Nikolaev, Tech. Phys. Lett. 40(4), 303 (2014).ADSCrossRefGoogle Scholar
  5. 5.
    V. N. Maslov, V. M. Krymov, E. V. Kalashnikov, and V. I. Nikolaev, Fiz. Mekh. Mater. 5(21), 194 (2014).Google Scholar

Copyright information

© Pleiades Publishing, Ltd. 2015

Authors and Affiliations

  • V. N. Maslov
    • 1
    • 2
  • V. I. Nikolaev
    • 1
    • 2
    • 3
  • V. M. Krymov
    • 1
    • 2
  • V. E. Bugrov
    • 2
  • A. E. Romanov
    • 1
    • 2
  1. 1.Ioffe Physical-Technical InstituteRussian Academy of SciencesSt. PetersburgRussia
  2. 2.St. Petersburg State University of Information Technologies, Mechanics and OpticsSt. PetersburgRussia
  3. 3.Company “Perfect Crystals LLC”St. PetersburgRussia

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