Deposition of β-Ga2O3 layers by sublimation on sapphire substrates of different orientations
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Layers of β-Ga2O3 have been grown by sublimation on sapphire substrates of different orientations. The main features of the crystal growth, morphology of layers, and their composition have been studied.
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- 5.V. N. Maslov, V. M. Krymov, E. V. Kalashnikov, and V. I. Nikolaev, Fiz. Mekh. Mater. 5(21), 194 (2014).Google Scholar