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Semiconductors

, Volume 52, Issue 2, pp 254–259 | Cite as

Electrical Activity of Extended Defects in Multicrystalline Silicon

  • S. M. Pescherova
  • E. B. Yakimov
  • A. I. Nepomnyashchikh
  • L. A. Pavlova
  • O. V. Feklisova
  • R. V. Presnyakov
Fabrication, Treatment, and Testing of Materials and Structures
  • 35 Downloads

Abstract

The excess carrier lifetime (τ) distribution in multicrystalline silicon grown by the Bridgman technique from high-purity metallurgical silicon (HPMG-Si) is studied. The features of the variation in τ, caused by the grain-boundary structure of ingots, are revealed. The grain boundaries, dislocations, and impurity microinclusions are studied by electron probe microanalysis (EPMA) and scanning electron microscopy (SEM) using selective acid etching. The electrical activity of extended defects is measured by the electronbeam- induced-current (EBIC) method.

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Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  • S. M. Pescherova
    • 1
  • E. B. Yakimov
    • 2
  • A. I. Nepomnyashchikh
    • 1
  • L. A. Pavlova
    • 1
  • O. V. Feklisova
    • 2
  • R. V. Presnyakov
    • 1
  1. 1.Vinogradov Institute of Geochemistry, Siberian BranchRussian Academy of SciencesIrkutskRussia
  2. 2.Institute of Microelectronics Technology and High Purity MaterialsRussian Academy of SciencesChernogolovkaRussia

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