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Semiconductors

, Volume 44, Issue 6, pp 778–788 | Cite as

A high-temperature radiation-resistant rectifier based on p+-n junctions in 4H-SiC ion-implanted with aluminum

  • E. V. Kalinina
  • V. G. Kossov
  • R. R. Yafaev
  • A. M. Strel’chuk
  • G. N. Violina
Physics of Semiconductor Devices

Abstract

A combination of a high-dose (5 s- 1016 cm-2) implantation of Al ions into epitaxial n-type 4H SiC layers grown by chemical deposition from th e vapor phase and rapid (15 s) thermal annealing at 1700–1750°C has been used to form layers with a rectangular impurity profile according to the mechanism of solid-phase epitaxial crystallization. The combined effects of enhanced diffusion of radiation defects after implantation and gettering of defects during annealing bring about an improvement in the quality of the initial material, which ensures an increase in the diffusion length of the minority charge carriers by several times. Metastable states annealed within different temperature ranges are formed in SiC under the effect of irradiation with various particles. Low-temperature annealing of radiation defects increases the radiation and temporal lifetime of devices under irradiation. High-temperature annealing of radiation defects makes it possible to vary the lifetime of nonequilibrium charge carriers, i.e, vary the frequency range of devices. The radiation resistance of SiC-based devices increases as the operation temperature is increased to 500°C.

Keywords

Radiation Defect Strel Diode Structure High Energy Particle Nonequilibrium Charge Carrier 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Pleiades Publishing, Ltd. 2010

Authors and Affiliations

  • E. V. Kalinina
    • 1
  • V. G. Kossov
    • 2
  • R. R. Yafaev
    • 2
  • A. M. Strel’chuk
    • 1
  • G. N. Violina
    • 3
  1. 1.Ioffe Physicotechnical InstituteRussian Academy of SciencesSt. PetersburgRussia
  2. 2.Electron OptronicSt. PetersburgRussia
  3. 3.St. Petersburg State Electrotechnical University (LETI)St. PetersburgRussia

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