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Semiconductors

, Volume 43, Issue 7, pp 872–876 | Cite as

Radiation effects in multilayer ohmic contacts Au-Ti-Al-Ti-n-GaN

  • A. E. Belyaev
  • N. S. Boltovets
  • V. N. Ivanov
  • L. M. Kapitanchuk
  • R. V. KonakovaEmail author
  • Ya. Ya. Kudryk
  • O. S. Lytvyn
  • V. V. Milenin
  • V. N. Sheremet
  • Yu. N. Sveshnikov
Semiconductor Structures, Interfaces, and Surfaces

Abstract

Radiation effects in the Au-Ti-Al-Ti-n-GaN multilayer metallization subjected to irradiation with 60Co γ-ray photons in the dose range 4 × 106−2 × 107 Gy are considered, and the effect of radiation on the initial contact structures and the structures subjected to a rapid thermal annealing (RTA) at high-temperature in the nitrogen atmosphere is studied. Irradiation does not significantly affect the properties of structures that were not subjected to the heat treatment. An RTA at 700°C brings about a deterioration of the contact-layer morphology. The morphological and structural transformations in the contact metallization due to the RTA are enhanced by irradiation with γ-ray photons. The combined radiation-thermal treatment is conducive to the mass transfer between contacting layers. In addition, after γ-ray irradiation with the dose of 2 × 107 Gy, the oxygen-impurity atoms appear over the entire contact’s structure and are observed in a large amount in the near-contact GaN region.

PACS numbers

85.40.Ls 85.30.Hi 

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Copyright information

© Pleiades Publishing, Ltd. 2009

Authors and Affiliations

  • A. E. Belyaev
    • 1
  • N. S. Boltovets
    • 2
  • V. N. Ivanov
    • 2
  • L. M. Kapitanchuk
    • 3
  • R. V. Konakova
    • 1
    Email author
  • Ya. Ya. Kudryk
    • 1
  • O. S. Lytvyn
    • 1
  • V. V. Milenin
    • 1
  • V. N. Sheremet
    • 1
  • Yu. N. Sveshnikov
    • 4
  1. 1.V. Lashkaryov Institute of Semiconductor PhysicsNational Academy of Sciences of UkraineKyivUkraine
  2. 2.State Scientific Research Institute “Orion,”KyivUkraine
  3. 3.Paton Institute of Electric WeldingNational Academy of Sciences of UkraineKyivUkraine
  4. 4.Malachite-ELMA Joint-Stock CompanyMoscowRussia

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