Growth of crystalline ZnO films on the nitridated (0001) sapphire surface
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The surface morphology and structure of (0001) sapphire substrates subjected to thermochemical nitridation in a mixture of N2, СО, and Н2 gases are investigated by electron and probe microscopy and X-ray and electron diffraction. It is shown that an aluminum nitride layer is formed on the substrate surface and heteroepitaxial ZnO films deposited onto such substrates by magnetron sputtering have a higher quality when compared with films grown on sapphire.
KeywordsElectron Diffraction Pattern Crystallography Report Sapphire Substrate Chemical Mechanical Polishing Zinc Oxide Film
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