Formation of needlelike crystallites during growth of diamond films by chemical vapor deposition
Diamond polycrystalline films have been grown by chemical vapor deposition from a hydrogenmethane mixture. The phase composition and structure of the films were studied using Raman spectroscopy, electron microscopy, and thermogravimetry. It is found that, upon heating in air, the oxidation of the carbon material forming the films occurs at significantly different temperatures, depending on the degree of its order and the crystallite size. This difference is used for selective oxidation of the least ordered fine-grained component of the films. The material obtained by this selective oxidation of the films consists of diamond crystallites shaped like regular micrometer-sized tetragonal pyramids with a radius of tip curvature of several nanometers.
Unable to display preview. Download preview PDF.
- 1.J. E. Field, The Properties of Natural and Synthetic Diamond (Academic, London, 1997).Google Scholar
- 2.Handbook of Industrial Diamonds and Diamond Films, Ed. by M. A. Prelas et al. (Marcel Dekker, New York, 1998).Google Scholar
- 5.B. V. Spitsyn, Growth of Diamond Films from the Vapour Phase. Handbook of Crystal Growth, Vol. 3, Ed. by D. T. J. Hurtle (Elsevier, Amsterdam, 1994), p. 711.Google Scholar
- 6.M. Wolfer, J. Biener, B. El-dasher, et al., Diamond Relat. Mater. 11, 34 (2008).Google Scholar
- 8.A. A. Zolotukhin, A. N. Obraztsov, A. O. Ustinov, and A. P. Volkov, Zh. Eksp. Teor. Fiz. 124, 1291 (2003) [JETP 97, 1154 (2003)].Google Scholar
- 10.A. V. Khomich, P. I. Perov, V. I. Polyakov, et al., in Proc. Third Int. Conf. “Application of Diamond Films and Related Materials,” Ed. by A. Feldman et al. (Government Printing Office, Washington, 1995).Google Scholar