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Russian Microelectronics

, Volume 42, Issue 8, pp 458–462 | Cite as

Initiation of a polarized state in thin lithium niobate films synthesized on isolated silicon substrates

  • D. A. Kiselev
  • R. N. Zhukov
  • A. S. Bykov
  • M. D. Malinkovich
  • Yu. N. Parkhomenko
  • E. A. Vygovskaya
Article
  • 42 Downloads

Abstract

The distributions of induced state and surface potential in thin lithium niobate films obtained via the deposition onto a (100)-oriented Si-oxidized substrate by the method of high-frequency magnetron sputtering were mapped using piezoresponse force microscopy (PFM) and Kelvin probe force microscopy (KPFM). Using an electrical field applied with a conducting cantilever, the possibility of the formation of an induced polarization state and of its subsequent visualization was shown. The induced state in KPFM measurements was shown to be retained for a much longer time than for PFM.

Keywords

thin films Kelvin probe force microscopy piezoresponse force microscopy surface potential lithium niobate 

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Copyright information

© Pleiades Publishing, Ltd. 2013

Authors and Affiliations

  • D. A. Kiselev
    • 1
  • R. N. Zhukov
    • 1
  • A. S. Bykov
    • 1
  • M. D. Malinkovich
    • 1
  • Yu. N. Parkhomenko
    • 1
  • E. A. Vygovskaya
    • 1
  1. 1.Moscow Institute of Steel and AlloysNational University of Science and TechnologyMoscowRussia

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