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Russian Microelectronics

, Volume 41, Issue 8, pp 489–490 | Cite as

Study of the spectral dependence of the absorption coefficient of undoped silicon-carbon films

  • M. D. Malinkovich
  • Yu. N. Parkhomenko
  • M. L. Shupegin
  • A. P. Bliev
  • A. V. Gritsenko
Article
  • 57 Downloads

Abstract

The spectral dependence of the absorption coefficient in the wavelength range from 190 nm to 1.9 μm of undoped silicon-carbon films synthesized from organosilicon liquid of polyphenylmethylsiloxane (PPMS) by high-frequency deposition from plasma of PPMS vapors is studied. The shortwave absorption region of the films is shown to be nonmonotonic: it contains electron transitions of different kinds, probably including interband ones.

Keywords

Electron Transition Carbon Film Spectral Dependence RUSSIAN Microelectronics Carbon Matrix 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

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    Malinkovich, M.D., Parkhomenko, Yu.N., Skryleva, E.A., and Shupegin, M.L., Manufacturing Technology, Structure, and Properties of Metal-Containing Nanocomposites with a Silicon-Carbon Matrix, Izv. Vyssh. Uchebn. Zaved., Mater. Elektron. Tekh., 2005, no. 3, pp. 12–16.Google Scholar
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    Belogorokhov, A.I., Dodonov, A.M., Malinkovich, M.D., Parkhomenko, Yu.N., Smirnov, A.P., and Shupegin, M.L., Study of the Molecular Structure of the Matrix of Diamond-Like Silicon-Carbon Nanocomposites, Izv. Vyssh. Uchebn. Zaved., Mater. Elektron. Tekh., 2007, no. 1, pp. 69–71.Google Scholar
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Copyright information

© Pleiades Publishing, Ltd. 2012

Authors and Affiliations

  • M. D. Malinkovich
    • 1
  • Yu. N. Parkhomenko
    • 1
  • M. L. Shupegin
    • 1
  • A. P. Bliev
    • 1
  • A. V. Gritsenko
    • 2
  1. 1.National University of Science and Technology MISISMoscowRussia
  2. 2.North Ossetian State UniversityNorth Ossetia-AlaniaRussia

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