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Russian Microelectronics

, Volume 40, Issue 7, pp 529–532 | Cite as

Peculiarities of three-passage measurements in magnetic force microscopy

  • A. M. Alekseev
  • V. N. Komkov
  • S. Yu. Krasnoborod’ko
  • A. B. Shubin
  • V. I. Shevyakov
Measurement Methods and Technique

Abstract

The method of three-passage measurements in magnetic force microscopy is described, which yields refined magnetic images of nano and microobjects, and eliminates the possible parasitic influence of long-range electrostatic forces while obtaining a magnetic image.

Keywords

Test Structure RUSSIAN Microelectronics Scanning Probe Microscopy Electrical Force Magnetic Force Microscopy 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    Nevolin, V.K., Zondovye nanotekhnologii v elektronike (Probe Technologies in Electronics), Moscow: Tekhnosfera, 2005.Google Scholar
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    Mironov, V.L., Osnovy skaniruyushchei zondovoi mikroskopii (Foundations of Scanning Probe Microscopy), Moscow: Tekhnosfera, 2004.Google Scholar
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    Bykov, V.A., Alekseev, A.M., Ryabokon’, V.N., and Saunin, S.A., RF Patent no. 2 193 769.Google Scholar
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    Nonnenmacher, M., O’Boyle, M.P., and Wikramasinghe, H.K., Kelvin Probe Force Microscopy, Appl. Phys. Lett., 1991, vol. 58, pp. 2921–2923.CrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2011

Authors and Affiliations

  • A. M. Alekseev
    • 1
  • V. N. Komkov
    • 1
  • S. Yu. Krasnoborod’ko
    • 1
  • A. B. Shubin
    • 1
  • V. I. Shevyakov
    • 2
  1. 1.ZAO Nanotekhnologiya MDTMoscowRussia
  2. 2.Moscow State Institute of Electronic Engineering (Technical University)Zelenograd, Moscow oblastRussia

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