Russian Microelectronics

, Volume 38, Issue 5, pp 320–326 | Cite as

Methods of parallel integration of carbon nanotubes during the formation of functional devices for microelectronics and sensor technologies

Production-Process Dynamics

Abstract

Methods of formation of thin film structures and sensor elements based on carbon nanotubes have been developed. Methods of integration using deposition from solutions, probe micromechanics and the electrokinetic positioning of nanotubes providing compatibility with traditional microelectronic technology, are suggested. Peculiarities of the parallel integration of carbon nanotubes in the process of formation of thin films, networks, and individual conduction channels are revealed.

PACS

78.70.Bj 

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Copyright information

© Pleiades Publishing, Ltd. 2009

Authors and Affiliations

  1. 1.Moscow Institute of Electronic Technology (Technical University)MoscowRussia
  2. 2.OOO NanosensorMoscowRussia

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