Russian Microelectronics

, Volume 36, Issue 3, pp 164–170 | Cite as

Polymer surface deformation under semicontact-mode AFM scanning

  • A. B. Petrov
  • R. R. Gallyamov
Thin Films


An experiment and a computer simulation are presented concerning the tip-induced deformation of polyethylene under semicontact-mode AFM scanning. The dependence is investigated of the deformation on normalized amplitude of scanning with due regard to cantilever damping. The measured and the simulated deformation curve are found to agree for sufficiently large normalized scanning amplitudes. Otherwise, the experiment and the simulation diverge. Reasons for this disagreement are suggested within the context of different physical processes influencing the deformation.

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Copyright information

© Pleiades Publishing, Ltd. 2007

Authors and Affiliations

  • A. B. Petrov
    • 1
  • R. R. Gallyamov
    • 1
  1. 1.Bashkir State UniversityUfa, BashkortostanRussia

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