On determination of the fluctuation sensitivity limit of the induction method for the measurement of surface roughness
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The fluctuation sensitivity limit of the induction method for the measurement of surface roughness has been determined. It has been shown that, for a profilograph used in this work, the minimum value of magnetic induction resulting from current thermal fluctuations is equal to 3 × 10−7 G. According to the experimental data, a change in the surface relief height by 2 nm varies the magnetic induction by 2 × 10−6 G, i.e., by a value exceeding the value determined for the thermal fluctuations by an order of magnitude. Hence, the design of the differential inductive sensor proposed for the profilograph can be used to measure the surface roughness on the order of several fractions of a nanometer.
KeywordsMagnetic Induction Colloid Journal Induction Method Linear Guide Induc Tion Sensor
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