Quasi-common-path microchip laser feedback interferometry with a high stability and accuracy
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We report on an improved scheme of quasi-common-path microchip laser feedback interferometry, which demonstrates a high stability and accuracy. An additional beam splitter is used to divide the external cavity into a measuring feedback cavity and a reference feedback cavity. With this scheme, the optical path lengths of the measuring and reference feedback light can be made nearly the same, thus greatly reducing the long-period phase fluctuation caused by the laser frequency drift. The final system performances are evaluated as followed: the short-term displacement resolution is better than 2 nm, the output fluctuation is less than 10 nm within a 40-min-long stability test, and the maximum error within the 100-μm range is 25 nm when calibrated with the Agilent 5529A dual-frequency laser interferometer.