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Doklady Physics

, Volume 58, Issue 1, pp 6–8 | Cite as

Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals

  • S. A. Nikitov
  • Yu. V. Gulyaev
  • D. A. Usanov
  • A. V. Skripal’
  • D. V. Ponomarev
Physics

Keywords

Photonic Crystal Microwave Radiation Residual Function Semiconductor Layer Semiconductor Wafer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    E. M. Gershenzon, L. B. Litvak-Gorskaya, L. A. Plokhova, and T. S. Zarubina, in Semiconductor Devices and Their Application (Moscow, 1970), no. 23, 3 [in Russian].Google Scholar
  2. 2.
    M. N. Asfar, J. R. Birch, and R. N. Clarke, Proc. IEEE 74(1), 183 (1986).CrossRefGoogle Scholar
  3. 3.
    D. A. Usanov, A. E. Postel’ga, and N. Yu. Sysoev, Izv. Vuzov. Elektronika 90, 71 (2011).Google Scholar
  4. 4.
    Yu. V. Gulyaev, S. A. Nikitov, D. A. Usanov, et al., Dokl. Akad. Nauk 443(5), 564 (2012).Google Scholar

Copyright information

© Pleiades Publishing, Ltd. 2013

Authors and Affiliations

  • S. A. Nikitov
    • 1
  • Yu. V. Gulyaev
    • 1
  • D. A. Usanov
    • 2
  • A. V. Skripal’
    • 2
  • D. V. Ponomarev
    • 2
  1. 1.Kotel’nikov Institute of Radio Engineering and ElectronicsRussian Academy of SciencesMoscowRussia
  2. 2.Saratov State UniversitySaratovRussia

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