Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals
KeywordsPhotonic Crystal Microwave Radiation Residual Function Semiconductor Layer Semiconductor Wafer
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
Unable to display preview. Download preview PDF.
- 1.E. M. Gershenzon, L. B. Litvak-Gorskaya, L. A. Plokhova, and T. S. Zarubina, in Semiconductor Devices and Their Application (Moscow, 1970), no. 23, 3 [in Russian].Google Scholar
- 3.D. A. Usanov, A. E. Postel’ga, and N. Yu. Sysoev, Izv. Vuzov. Elektronika 90, 71 (2011).Google Scholar
- 4.Yu. V. Gulyaev, S. A. Nikitov, D. A. Usanov, et al., Dokl. Akad. Nauk 443(5), 564 (2012).Google Scholar
© Pleiades Publishing, Ltd. 2013