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Features of Ion-Beam Polishing of the Surface of Sapphire

  • L. S. Lunin
  • B. M. Sinel’nikov
  • I. A. Sysoev
Article

Abstract

The effect of an argon ion beam on the surface of sapphire is studied at different technological parameters: the ion energy, and the angle α between the sapphire surface and the ion-beam axis. The roughness of the sapphire surface is analyzed before and after ion polishing. The optimum ion-beam parameters are determined, at which the surface roughness after polishing decreases to 0.8 nm. At angles α = 20°–30°, the relief of the sapphire surface is found to become wavy. The study of the impact of the ion energy on the roughness of the sapphire surface in the 400–1200-eV range reveals that an increase in the energy of the ion beam to 1200 eV is accompanied with a decrease by 8.8 times in the roughness which falls below the level of 3 nm.

Keywords

ion-beam treatment roughness of thesapphire surface Ar ion beam 

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References

  1. 1.
    Sputtering by Particle Bombardment III. Characteristics of Sputtered Particles, Technical Applications, Ed. by R. Behrisch and K. Wittmaack (Springer, Berlin, Heidelberg, 1991).Google Scholar
  2. 2.
    N. N. Andrianova, A. M. Borisov, V. V. Borovskaya, and E. S. Mashkova, Prikl. Fiz., No. 2, 36 (2012).Google Scholar
  3. 3.
    V. T. Barchenko, Yu. A. Bystrov, and E. A. Kolgin, Ion-Plasma Technologies for Electron Manufacturing, Ed. by Yu. A. Bystrov (Energoatomizdat, St. Petersburg, 2001) [in Russian].Google Scholar
  4. 4.
    W. L. Chan and E. Chason, J. Appl. Phys. 101, 121301 (2007).CrossRefGoogle Scholar
  5. 5.
    J. Vollner, B. Ziberi, F. Frost, and B. Rauschenbach, Mater. Res. Soc. Symp. Proc. 1181, DD13-15 (2009).Google Scholar
  6. 6.
    F. Frost, R. Fechner, B. Ziberi, et al., J. Phys.: Condens. Matter 21, 224026 (2009).Google Scholar
  7. 7.
    L. S. Lunin, I. A. Sysoev, S. N. Chebotarev, and A. S. Pashchenko, Vestn. Yuzhn. Nauchn. Tsentra Ross. Akad. Nauk 6 (4), 46 (2010).Google Scholar
  8. 8.
    F. Frost, B. Ziberi, R. Fechner, et al., in Proc. 19th Int. Conference “Interaction between Ions and Surface (VIP-2009)” (Moscow, 2009), Vol. 1, p. 195.Google Scholar
  9. 9.
    J. Vollner, B. Ziberi, F. Frost, and B. Rauschenbach, J. Appl. Phys. 109, 043501 (2011).CrossRefGoogle Scholar
  10. 10.
    N. N. Andrianova, A. M. Borisov, V. V. Borovskaya, and E. S. Mashkova, Prikl. Fiz., No. 2, 36 (2012).Google Scholar

Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  • L. S. Lunin
    • 1
  • B. M. Sinel’nikov
    • 2
  • I. A. Sysoev
    • 3
  1. 1.Southern Scientific CentreRussian Academy of SciencesRostov-on-DonRussia
  2. 2.OOO NPF “Eksiton”StavropolRussia
  3. 3.Northern-Caucasian Federal UniversityStavropolRussia

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