On the Precision Preparation of Samples for Atom Probe Tomography Using a Focused Ion Beam in a SEM
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Atom probe tomography is a modern and dynamically developing method of material investigation. It allows studies of the structure of matter at the atomic scale. The physical fundamentals of this method require a specific size, shape and conductivity type of the sample. To expand the analytical capabilities of atom probe tomography, a technique for preparing samples using a focused ion beam in a scanning electron microscope is studied and implemented in this work. The basic principles of this approach are demonstrated; its advantages, disadvantages and important practical aspects are described. To protect a fabricated sample from the influence of environment upon its transport to an atom probe tomograph, it is suggested a platinum coating be used. The atom-probe-tomography analysis of samples prepared with a focused ion beam is carried out. The effects of using such a sample preparation technique are studied.
KeywordsAtom probe tomography (АРТ) scanning electron microscope (SEM) focused ion beam FIB sample preparation
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