Influence of annealing temperature and its atmosphere on the properties of zinc implanted silicon

  • V. V. PrivezentsevEmail author
  • V. S. Kulikauskas
  • V. V. Zatekin
  • K. D. Shcherbachev
  • N. Yu. Tabachkova
  • K. B. Eidelman
  • S. V. Ksenich
  • A. A. Batrakov


The presented results characterize nanoparticle formation in n-Si(100) samples implanted with 50-keV 64Zn+ ions (the dose is 5 × 1016 cm‒2) at room temperature followed by heat treatment in an oxygen or nitrogen atmosphere at temperatures of 400–900°C. Defects and zinc concentration profiles are investigated via the Rutherford backscattering spectroscopy with the help of the channeling technique, in which 1.7-MeV He+ ions are scattered at an angle of 110°. The silicon surface layer is visualized using a transmission electron microscope equipped with an energy-dispersive microanalyzer. The surface topology of the implanted and annealed samples is studied via atomic-force microscopy. The implantation process is accompanied by the formation of a 150-nm-thick amorphous Si surface layer containing Zn nanoparticles with an average size of 4 nm, below which a radiation-damaged layer 50 nm thick is generated. After 800°C annealing in an oxygen atmosphere, a recrystallized single-crystal silicon layer with a complex ZnO/Zn2SiO4 phase is formed. After 800°C annealing in a nitrogen atmosphere, a recrystallized polycrystalline Si layer involving Zn nanoparticles is created.


ZnO nanoparticles silicon ion implantation X-ray diffraction analysis scanning and transmission electron microscopy Auger-electron spectroscopy thermal annealing Rutherford backscattering atomic-force microscopy 


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© Pleiades Publishing, Ltd. 2017

Authors and Affiliations

  • V. V. Privezentsev
    • 1
    Email author
  • V. S. Kulikauskas
    • 2
  • V. V. Zatekin
    • 2
  • K. D. Shcherbachev
    • 3
  • N. Yu. Tabachkova
    • 3
  • K. B. Eidelman
    • 3
  • S. V. Ksenich
    • 3
  • A. A. Batrakov
    • 4
  1. 1.Institute of Physics and TechnologyRussian Academy of SciencesMoscowRussia
  2. 2.Skobeltsyn Institute of Nuclear PhysicsMoscow State UniversityMoscowRussia
  3. 3.National University of Science and Technology “MISiS”MoscowRussia
  4. 4.National Research University “MPEI”MoscowRussia

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