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The effect of silicon-substrate orientation on the local piezoelectric characteristics of LiNbO3 films

  • D. A. KiselevEmail author
  • R. N. Zhukov
  • S. V. Ksenich
  • I. V. Kubasov
  • A. A. Temirov
  • N. G. Timushkin
  • A. S. Bykov
  • M. D. Malinkovich
  • V. V. Shvartsman
  • D. C. Lupascu
  • Yu. N. Parkhomenko
Article

Abstract

The domain structure of lithium-niobate thin films grown on Si(111) and Si(100) substrates coated with a native oxide layer with a thickness of no less than 2 nm is investigated by X-ray diffraction, scanning electron microscopy and piezoresponse force microscopy. The films are synthesized by the rf magnetron sputtering of a single-crystal lithium-niobate target. A high degree of grain orientation in the polycrystalline films is demonstrated. The piezoelectric coefficients d zz of the lithium-niobate films on Si(111) and Si(100) substrates are calculated from the measured dependences of the amplitude of the piezoresponse signal on the ac voltage applied between the cantilever tip and the substrate. Piezoelectric hysteresis loops are obtained in the remanent piezoelectric response regime

Keywords

lithium-niobate thin films magnetron sputtering piezoresponse force microscopy piezoelectric coefficient 

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Copyright information

© Pleiades Publishing, Ltd. 2016

Authors and Affiliations

  • D. A. Kiselev
    • 1
    Email author
  • R. N. Zhukov
    • 1
  • S. V. Ksenich
    • 1
  • I. V. Kubasov
    • 1
  • A. A. Temirov
    • 1
  • N. G. Timushkin
    • 1
  • A. S. Bykov
    • 1
  • M. D. Malinkovich
    • 1
  • V. V. Shvartsman
    • 2
  • D. C. Lupascu
    • 2
  • Yu. N. Parkhomenko
    • 1
  1. 1.National Research Technological University “MISiS”MoscowRussia
  2. 2.Universität Duisburg-EssenEssenGermany

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