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On the possibility of using the nanosize effect of ion sputtering in the development of a high-current source of atomic and cluster ions of solid-state elements

  • S. F. BelykhEmail author
  • A. B. Tolstogouzov
  • A. A. Lozovan
Article

Abstract

The methods for improving the efficiency of processes whereby metals are sputtered in the form of atomic and cluster ions are analyzed. The obtained results can be used to develop a new generation of sputtering-type high-current sources capable of generating atomic and cluster ions of solid-state elements, which are intended for technological applications.

Keywords

polyatomic bombarding ions sputtering-type ion source nanoparticle nanosize effect in ion sputtering target composed of a set of nanoparticles 

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Copyright information

© Pleiades Publishing, Ltd. 2015

Authors and Affiliations

  • S. F. Belykh
    • 1
    Email author
  • A. B. Tolstogouzov
    • 2
    • 3
  • A. A. Lozovan
    • 1
  1. 1.MATI–Tsiolkovsky Russian State Technological UniversityMoscowRussia
  2. 2.Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e TecnologiaUniversidade Nova de Lisboa, Campus de CaparicaCaparicaPortugal
  3. 3.Ryazan State Radio Engineering UniversityRyazanRussia

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