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Surface micromorphology of germanium single-crystal boules grown from melt

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Abstract

The morphology of the growth surface of germanium single crystals grown by directed crystallization and the Czochralski method is studied by interference profilometry, optical microscopy, and scanning electron microscopy (SEM). Stable periodic profile distributions on different time scales (~3 and ~0.3 s) indicating changes in the crystallization kinetics are revealed on the upper surface of disks grown by directed crystallization and the lateral cylindrical surface of Czochralski-pulled boules. Based on known data on temperature fluctuations at the crystal-melt interface and the parameters of the crystal’s surface profile and growth rates measured in this study, the kinetic coefficients are estimated to be βK = (2 × 10−6−7 × 10−7) m s−1 K−1. The two-dimensional pattern of irregularity distribution on the surfaces indicates the stepwise growth of the {111} singular faces according to the layer-by-layer mechanism. A correlation between profile irregularities and periodicity in the distribution of dislocation etch pits over the radius and lateral crystal surface is revealed on juvenile crystal surfaces.

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Authors and Affiliations

  1. Tver State University, Tver, 170100, Russia

    I. A. Kaplunov, A. I. Kolesnikov, A. I. Ivanova, S. A. Tretiakov & R. M. Grechishkin

  2. St. Petersburg Polytechnical State University, St. Petersburg, 195251, Russia

    I. A. Kaplunov & R. M. Grechishkin

  3. OAO Germaniy, Krasnoyarsk, 660027, Russia

    O. I. Podkopaev

  4. National University of Science and Technology MISiS, Moscow, 119049, Russia

    A. I. Kolesnikov

Authors
  1. I. A. Kaplunov
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  2. A. I. Kolesnikov
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  3. A. I. Ivanova
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  4. O. I. Podkopaev
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  5. S. A. Tretiakov
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  6. R. M. Grechishkin
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Corresponding author

Correspondence to I. A. Kaplunov.

Additional information

Original Russian Text © I.A. Kaplunov, A.I. Kolesnikov, A.I. Ivanova, O.I. Podkopaev, S.A. Tretiakov, R.M. Grechishkin, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 6, pp. 89–94.

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Kaplunov, I.A., Kolesnikov, A.I., Ivanova, A.I. et al. Surface micromorphology of germanium single-crystal boules grown from melt. J. Surf. Investig. 9, 630–635 (2015). https://doi.org/10.1134/S102745101503026X

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  • DOI: https://doi.org/10.1134/S102745101503026X

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