On the problem of the metrology of refractive X-ray optics
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A possible metrological approach to investigation of the optical properties, material structure and profile shape of compound refractive lenses (CRL) is proposed. The methods of X-ray radiography and electron microscopy are proposed for characterization of the profile of a refractive lens with a small curvature radius. Investigation of the material for problems of X-ray optics is performed using small-angle scattering and X-ray microscopy.
Keywordscompound refractive lenses (CRLs) metrology beryllium small-angle X-ray scattering (SAXS) parabolic profile radiography X-ray optics resolution
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