Thin-film protective coatings of beryllium windows and lenses for intense X-ray radiation sources
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The results of experiments on the formation and investigation of thin film Al2O3 coatings grown via atomic-layer deposition onto beryllium components for X-ray optics applications are detailed. The chemical properties and the structural and phase compositions of coated samples prior to and after exposure to a monochromatic and nonmonochromatic (“white”) synchrotron radiation with a power of up to 1 kW are studied. Approbation demonstrated the high durability of coatings exposed to an intense beam and the prevention of the penetration of unbound beryllium particles to the surface.
KeywordsALD Al2O3 thin films protective coatings beryllium optics
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