Scanning helium ion microscope: Distribution of secondary electrons and ion channeling

  • Yu. V. Petrov
  • O. F. Vyvenko
  • A. S. Bondarenko


The principles and features of operation of a scanning helium microscope are reviewed briefly. The measurement data on the energy distribution of secondary electrons excited by the ion beam in an Au film and on the angular dependence of the backscattered ion yield are obtained and presented for the first time. The effect of ion channeling in silicon single crystal with the (110) orientation is demonstrated.


Secondary Electron Surface Investigation Neutron Technique Electron Cascade Slight Relief 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    E. B. Myuller, Usp. Fiz. Nauk 77, 481 (1962).Google Scholar
  2. 2.
    V. N. Tondare, J. Vac. Sci. Technol. A 23, 1498 (2005).CrossRefADSGoogle Scholar
  3. 3.
    J. Notte, R. Hill, S. McVey, et al., Microsc. Microanal. 12, 126 (2006).CrossRefADSGoogle Scholar
  4. 4.
    B. W. Ward and J. A. Notte, J. Vac. Technol. B 24, 2871 (2006).CrossRefGoogle Scholar
  5. 5.
    J. Morgan, J. Notte, R. Hill, and B. Ward, Microsc. Today 14(4), 24 (2006).Google Scholar
  6. 6.
    S. Kalbitzer and V. Zhukov, Open Appl. Phys. J. 1, 4 (2008).CrossRefADSGoogle Scholar
  7. 7.
    R. Ramachandra, B. Griffin, and D. Joy, Ultramicroscopy 109, 748 (2009).CrossRefPubMedGoogle Scholar
  8. 8.
    K. Inai, K. Ohya, and T. Ishitani, J. Electron Microsc. 56(5), 163 (2007).CrossRefGoogle Scholar
  9. 9.
    V. Sidorkin, E. van Veldhoven, E. van der Drift, et al., J. Vac. Sci. Technol. B 27(4), L18 (2009).CrossRefGoogle Scholar
  10. 10.
    D. S. Gemmell, Rev. Mod. Phys. 46, 129 (1974).CrossRefADSGoogle Scholar
  11. 11.
    D. C. Joy, M. S. Prasad, and H. M. Meyer, J. Microsc. 215, 77 (2004).CrossRefMathSciNetPubMedGoogle Scholar
  12. 12.
    K. Ohya, T. Yamanaka, K. Inai, and T. Ishitani, Nucl. Instrum. Methods Phys. Res. B 267, 584 (2008).CrossRefADSGoogle Scholar
  13. 13.
    K. Ohya and J. Kawata, Nucl. Instrum. Methods Phys. Res. B 115, 265 (1996).CrossRefADSGoogle Scholar
  14. 14.
    I. Lindkhard, Usp. Fiz. Nauk 99, 249 (1969).Google Scholar

Copyright information

© Pleiades Publishing, Ltd. 2010

Authors and Affiliations

  • Yu. V. Petrov
    • 1
  • O. F. Vyvenko
    • 1
  • A. S. Bondarenko
    • 1
  1. 1.Physics FacultySt. Petersburg State UniversitySt. PetersburgRussia

Personalised recommendations