Advertisement

Quantitative elemental and phase composition analysis by auger spectra: Matrix factors

  • V. G. Beshenkov
  • Yu. N. Parkhomenko
  • D. A. Podgorny
  • E. A. Vigovskaya
  • O. V. Toropova
Proceedings of the Sixth National Conference on Application of X-Ray, Synchrotron Radiation, Neutrons and Electrons for Material Characterization (Shubnikov Institute of Crystallography RAS, Moscow, 2007)
  • 25 Downloads

Abstract

This work is devoted to the methodical support of composition diagnostics of near-surface layers, thin films, and layered structures with interfaces by Auger spectra in the course of ion profiling. Two alternative approaches used currently in diagnostics, elemental and phase analysis, are compared by an example of objects of the known phase composition, which are buried cobalt disilicide layers in silicon. Contributions of the ion sputtering, primary electron beam backscattering, generation and escape of Auger electrons are considered.

Keywords

Neutron Technique Auger Electron Auger Spectrum Auger Line Primary Electron Beam 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Practical Surface Analysis: Auger and X-Ray Photoelectron Spectroscopy, Ed. by D. Briggs and M. P. Seah (Wiley, Chichester, 1990; Mir, Moscow, 1987).Google Scholar
  2. 2.
    S. S. Voitusik, A. I. Zagorenko, and V. I. Zaporozhchenko, Izv. Akad. Nauk SSSR, Ser. Fiz. 54, 1298 (1990).Google Scholar
  3. 3.
    Th. Wirth, M. Procop, and H. Lange, Surf. Interface Anal. 8, 7 (1986).CrossRefGoogle Scholar
  4. 4.
    V. G. Beshenkov, Yu. N. Parkhomenko, D. A. Podgorny, and E. G. Polyakova, Izv. Akad. Nauk, Ser. Fiz. 69, 493 (2005).Google Scholar
  5. 5.
    S. W. Gaarenstroom, Appl. Surf. Sci. 7, 1 (1981).CrossRefGoogle Scholar
  6. 6.
    V. G. Beshenkov, Zavod. Labor. Diagnost. Mater., No. 2, 17 (1996).Google Scholar
  7. 7.
    Handbook of Auger Electron Spectroscopy Ed. by C. L. Hedberg (Physical Electronics, Eden Prairie, MN, 1995).Google Scholar
  8. 8.
    S. Ichimura and R. Shimizu, Surf. Sci. 112, 386 (1981).CrossRefADSGoogle Scholar
  9. 9.
    S. A. Aivazyan, V. M. Buchshtaber, I. S. Enyukov, and L. D. Meshalkin, Applied Statistics: Classification and Reduction of Dimensionality (Finansy i Statistika, Moscow, 1989) [in Russian].Google Scholar
  10. 10.
    Handbook of Applied Statistics, Ed. by E. Lloyd et al., Vol. 2 (Finansy i Statistika, Moscow, 1990) [in Russian].Google Scholar
  11. 11.
    V. G. Beshenkov, Yu. N. Parkhomenko, and D. A. Podgorny, Izv. Vuzov. Mater. Elektron. Tekhn. No. 3, 62 (2004).Google Scholar

Copyright information

© MAIK Nauka 2008

Authors and Affiliations

  • V. G. Beshenkov
    • 1
  • Yu. N. Parkhomenko
    • 2
  • D. A. Podgorny
    • 2
  • E. A. Vigovskaya
    • 2
  • O. V. Toropova
    • 2
  1. 1.Institute of Microelectronics Technology and High Purity MaterialsRussian Academy of SciencesChernogolovka, Moscow oblastRussia
  2. 2.Moscow Institute of Steel and Alloys (State Technological University)MoscowRussia

Personalised recommendations