Quantitative elemental and phase composition analysis by auger spectra: Matrix factors

  • V. G. Beshenkov
  • Yu. N. Parkhomenko
  • D. A. Podgorny
  • E. A. Vigovskaya
  • O. V. Toropova
Proceedings of the Sixth National Conference on Application of X-Ray, Synchrotron Radiation, Neutrons and Electrons for Material Characterization (Shubnikov Institute of Crystallography RAS, Moscow, 2007)


This work is devoted to the methodical support of composition diagnostics of near-surface layers, thin films, and layered structures with interfaces by Auger spectra in the course of ion profiling. Two alternative approaches used currently in diagnostics, elemental and phase analysis, are compared by an example of objects of the known phase composition, which are buried cobalt disilicide layers in silicon. Contributions of the ion sputtering, primary electron beam backscattering, generation and escape of Auger electrons are considered.


Neutron Technique Auger Electron Auger Spectrum Auger Line Primary Electron Beam 
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Copyright information

© MAIK Nauka 2008

Authors and Affiliations

  • V. G. Beshenkov
    • 1
  • Yu. N. Parkhomenko
    • 2
  • D. A. Podgorny
    • 2
  • E. A. Vigovskaya
    • 2
  • O. V. Toropova
    • 2
  1. 1.Institute of Microelectronics Technology and High Purity MaterialsRussian Academy of SciencesChernogolovka, Moscow oblastRussia
  2. 2.Moscow Institute of Steel and Alloys (State Technological University)MoscowRussia

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