A Methodology for Measuring the Parameters of Large Concave Aspherical Mirrors by Means of a Wavefront Sensor
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A methodology has been developed for measuring radius Rv and eccentricity (conic parameter k) of large concave aspherical mirrors using a wavefront sensor. Analytical expressions that directly relate Zernike coefficients a4 and a9 to parameters Rv and k of the mirror are obtained. It is shown that the technique does not require accurate mirror alignment before measurements. A computer analysis showed that the developed scheme enables measurements with errors of δRv < 0.1% and δk < 0.01 for mirrors with radii from 100 to 2000 mm and with errors of δRv < 0.01% and δk < 0.001 for mirrors with radii of more than 5000 mm.
Keywords:aspherical surface aspherical mirror metrology Shack–Hartmann sensor wavefront sensor radius of curvature eccentricity conic parameter measurement errors Zemax
CONFLICT OF INTEREST
The authors declare that they have no conflict of interest.
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