Advertisement

Optics and Spectroscopy

, Volume 119, Issue 4, pp 724–727 | Cite as

Formation of a wedge-shaped element on an end face of a microstrip optical waveguide designed to minimize loss when coupling with an optical fiber

  • V. K. Balya
  • I. Yu. Denisyuk
Geometrical and Applied Optics
  • 39 Downloads

Abstract

We have investigated a method for forming microstrip optical waveguides of variable cross section designed for coupling a planar waveguide with an optical fiber. The method is based on the use of combined reactive-ion etching of polymer cladding and photoresist. It is shown that butt expansions and a microstrip waveguide can be formed in one technological process. The influence of the conditions of reactive-ion etching on the quality of the waveguide optical surface is analyzed.

Keywords

Optical Fiber Planar Waveguide Groove Depth Butt Joint Photoresist Layer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    H. Ma, A. K.-Y. Jen, and L. R. Dalton, Adv. Mater. 14 (19), 1339 (2002).CrossRefGoogle Scholar
  2. 2.
    J. Moisel, J. Guttmann, H.-P. Huber, O. Krumpholz, M. Rode, R. Bogenberger, and K.-P. Kuhn, Opt. Engin. 39 (3), 673 (2000).CrossRefADSGoogle Scholar
  3. 3.
    F. Schiappelli, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, Microelectron. Engin. 73–74, 397 (2004).CrossRefGoogle Scholar
  4. 4.
    T. S. Lay, H. M. Yang, C. W. Lee, and W. H. Cheng, Opt. Commun. 233 (1–3), 89 (2004).CrossRefADSGoogle Scholar
  5. 5.
    M. I. Fokina, N. O. Sobeshuk, and I. Y. Denisyuk, Natural Sci. 2 (8), 868 (2010).CrossRefGoogle Scholar
  6. 6.
    A. Yacoubian, W. Lin, and J. H. Bechtel, Proc. SPIE 4490, 22 (2001).CrossRefADSGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2015

Authors and Affiliations

  1. 1.ITMO UniversitySt. PetersburgRussia

Personalised recommendations