Optics and Spectroscopy

, Volume 101, Issue 6, pp 976–979 | Cite as

Focused image holograms in high-resolution holographic projection photolithography

  • S. N. Koreshev
  • V. P. Ratushnyĭ


Features of the imaging properties of focused image holograms (FIHs) obtained by means of total internal reflectance holography using optical systems of the hologram-low-quality objective (LQO) type are considered. Two schemes for hologram recording and reconstruction that can be used in combination with such projection objectives are considered. The results of investigation of the quality of images obtained using FIHs of two-dimensional transparencies are presented and analyzed. It is concluded that FIH-LQO systems have good prospects for use in high-resolution projection photolithography.

PACS numbers



Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    J. Webb, Laser Focus World 36(9), 87 (2000).Google Scholar
  2. 2.
    S. N. Koreshev and V. P. Ratushnyĭ, Opt. Zh. 71(10), 32 (2004) [J. Opt. Technol. 71 (10), 673 (2004)].Google Scholar
  3. 3.
    S. N. Koreshev and V. P. Ratushnyi, Proc. SPIE-Int. Soc. Opt. Eng. 5290, 221 (2004).ADSGoogle Scholar
  4. 4.
    R. J. Collier, C. B. Burckhardt, and L. H. Lin, Optical Holography (Academic, New York, 1971; Mir, Moscow, 1973).Google Scholar
  5. 5.
    K. A. Stetson, Appl. Phys. Lett. 11, 225 (1967).CrossRefGoogle Scholar
  6. 6.
    G. Voinin, U. Benner, F. Clube, et al., Microelectron. Eng. 41/42, 149 (1998).CrossRefGoogle Scholar
  7. 7.
    I. J. Jusupov and M. D. Mikhailov, Proc. SPIE-Int. Soc. Opt. Eng. 1238, 240 (1989).Google Scholar

Copyright information

© Pleiades Publishing, Inc. 2006

Authors and Affiliations

  • S. N. Koreshev
    • 1
  • V. P. Ratushnyĭ
    • 2
  1. 1.All-Russia Research Center Vavilov State Optical InstituteSt. PetersburgRussia
  2. 2.ZAO HoloGrateSt. PetersburgRussia

Personalised recommendations